ZYGO ZMI-4004 8020-0500-01 VME64x Measurement Board ZMI4004.The ZYGO ZMI-4004 is a sophisticated VME64x measurement board designed for high-precision metrology applications. This measurement board is developed based on the company's expertise in interferometric measurement systems. Compared with earlier models such as the ZMI-501A, it has more powerful functions.
Key Features:
High Resolution: It can reach up to 0.15nm, enabling precise measurement of tiny displacement changes.
High Speed: It supports a speed measurement of 2.55m/sec, allowing for rapid tracking of moving objects.
Multi - axis Measurement: Each board has 4 axes, which can simultaneously measure displacements in multiple directions.
High Data Rate: With a data rate of 10MHz, it can output measurement data in a timely manner, ensuring the real - time nature of measurements.
Multiple Connections: It is equipped with ST fiber - optic and HSSDC electrical connections, facilitating communication and data transfer with other devices.
Functions and Applications:
It is mainly applied in fields that require high - precision displacement measurement, such as semiconductor lithography equipment and nano - positioning systems. It can provide accurate position feedback for these devices to achieve high - precision motion control and position measurement, thereby ensuring the processing accuracy and performance of the devices. For example, in the semiconductor lithography process, it can accurately measure the position of the lithography head to guarantee the precise drawing of chip patterns.
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