ZYGO ZMI 501A | 8020-0237-01| 0090-A6270 | Measurement Electronics Module.The ZYGO ZMI 501A 8020-0237-01 0090-A6270 Measurement Electronics Module is a sophisticated two - channel fiber - based displacement/distance measuring interferometer system, meticulously crafted for high - precision metrology application scenarios. This measurement module integrates high - resolution displacement sensing technology and excellent interface performance, enabling it to meet extremely stringent requirements in industrial and scientific applications.(Related products:ZMI-2001 8020-0210-01-J )
Parameter Specification
Model Numbers：8020-0237-01, 0090-A6270
Channels：2 channels per board
Position Resolution：Up to 1/512 (1.24 nm)
Position Range：±10.6 meters
Max Target Mirror Velocity：475 mm/sec
Data Rate：3-24 MHz selectable
Optical Input Power：Minimum 8 µW
Linearity Accuracy：1.3 LSB at 3V
It is part of the product line of Zygo Corporation, which specializes in manufacturing nano - position sensors and displacement - measuring interferometers. Specifically, the ZMI 501A is a two - channel system. Its physical characteristics include a weight of 2 pounds (1 kilogram), a cable clearance of 5 inches (127 millimeters) at both ends. The power requirements are +5.2 VDC with a current of 3.3 A. It is designed to operate within an ambient temperature range of 0 to 40 °C under non - condensing conditions, ensuring reliable operation under various temperature conditions.
The ZMI 501A has excellent measurement capabilities, being able to handle 2 axes per board. Its minimum optical input power is 8 µW, and the linear accuracy is 1.3 LSB at 3V. For serial data, the position resolution can reach up to O/512 (1.24 nm), the position range is ± 10.6 m, and the maximum target mirror speed is 475 mm/sec. The data rate can be selected between 3 and 24 MHz. These specifications make the ZMI 501A suitable for applications that require high precision and stability, such as wafer stages, stacker stage systems, reticle stages, gantry systems, and steering mirrors.
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