The AMAT 0190 - 07970 SE CH Interlock Module monitors the status of machinery, environmental parameters and operating procedures in real time to ensure that critical modules such as process chambers and transfer manipulators operate under safe conditions. The module is used for interlocking equipment, monitoring and analysing signals to ensure that the semiconductor manufacturing equipment is operated in accordance with strict operating sequences and safety rules. For example, during the start-up phase, the interlock module checks the status of all relevant sub-systems and will only allow the equipment to start up if all conditions meet the preset safety criteria. During operation, if an abnormality is detected, such as high temperature, abnormal pressure or equipment component failure, it can react quickly to trigger the interlocking mechanism to stop the relevant equipment, thus effectively preventing accidents from occurring or further expansion.
AMAT 0190 - 07970 SE CH Interlock Module is highly reliable. It adopts advanced circuit design and high-quality electronic components, which can work stably in complex electromagnetic environment and frequent signal switching, reducing the probability of false alarms and missed alarms. Its response speed is extremely fast, able to react to abnormal signals in microseconds, ensuring that the equipment enters a safe state in the shortest possible time. Moreover, the module has good compatibility and can be seamlessly integrated with a variety of different models of semiconductor manufacturing equipment, making it convenient for manufacturers to flexibly configure and upgrade according to their own production needs.
Technical Parameters
Input interface: Receive 24V DC digital signals.
Logic Processing Unit: Based on FPGA or microcontroller to realise safety logic, response time ≤10ms.
Output Relay:Drive device power or pneumatic valve, maximum load capacity 5A@30V DC.
Communication module: Support RS-485, EtherCAT or SECS/GEM protocol, data interaction with equipment master control system.
Status Indicator:Multi-colour LEDs to show operation/alarm status.
Supply Voltage:24V DC ±10%
Number of input channels:16 digital inputs (opto-isolated)
Number of output channels:8 relay outputs (normally open/closed configurable)
Operating temperature range:0°C ~ 55°C
Protection class:IP20 (to be installed in the equipment control cabinet)
Certification:SEMI S2/S8 (Semiconductor Equipment Safety Code)
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